1. Physical sputtering of single-element solids -- 2. Sputtering of alloys and compounds, electron and neutron sputtering, surface topography -- 3. Characteristics of sputtered particles, technical applic
TOPICAL NAME USED AS SUBJECT
Entry Element
، Sputtering )Physics(
Entry Element
، Solids-- Effect of radiation on
Entry Element
، Surfaces )Physics(-- Effect of radiation on
LIBRARY OF CONGRESS CLASSIFICATION
Class number
QC
176
.
8
.
S72
.
S68
PERSONAL NAME - PRIMARY RESPONSIBILITY
Relator Code
TI
Entry Element
edited by R. Behrisch ; with contributions by H.H. Andersen ... ]et al.[