عنوان
پدید آورنده
موضوع
رده
QC 176 .8 .S72 .S68
QC
176
.
8
.
S72
.
S68
کتابخانه
محل استقرار
79344
79349
97683
آخر۲۷
English
)40(
Sputtering by particle bombardment
Berlin, New York
Springer-Verlag
1981-1991
3 v. : ill. ; 24 cm
Topics in applied physics, v. 74, 25, 46
Includes bibliographical references and indexes
1. Physical sputtering of single-element solids -- 2. Sputtering of alloys and compounds, electron and neutron sputtering, surface topography -- 3. Characteristics of sputtered particles, technical applic
، Sputtering )Physics(
، Solids-- Effect of radiation on
، Surfaces )Physics(-- Effect of radiation on
QC
176
.
8
.
S72
.
S68
TI
edited by R. Behrisch ; with contributions by H.H. Andersen ... ]et al.[
AU .reniaR ,hcsirheB
AU .kirneH snaH ,nesrednA
TI Particle bombardment
TI Particle bombardment
SE
04
04
04
