عنوان
پدید آورنده
موضوع
رده
TA,2020,.F73,2010
TA
,
2020
,.
F73
,
2010
کتابخانه
محل استقرار
استان: East Azarbaijan ـ شهر: Tabriz
English Book
TITLE AND STATEMENT OF RESPONSIBILITY
Title Proper
Low pressure plasmas and microstructuring technology
First Statement of Responsibility
Gerhard Franz
.PUBLICATION, DISTRIBUTION, ETC
Place of Publication, Distribution, etc.
Berlin
Name of Publisher, Distributor, etc.
Springer
Date of Publication, Distribution, etc.
2010
PHYSICAL DESCRIPTION
Specific Material Designation and Extent of Item
xxiv, 732 p. , ill. , 24 cm.
INTERNAL BIBLIOGRAPHIES/INDEXES NOTE
Text of Note
Includes bibliographical references (p. 669-703) and index.
TOPICAL NAME USED AS SUBJECT
Entry Element
#TA2020.F73 2009
Entry Element
Plasma (Ionized gases), Industrial applications
Entry Element
Plasma engineering
Entry Element
Plasma etching
Entry Element
Ionenstrahlbearbeitung
Entry Element
Niederdruckplasma, Hochfrequenzentladung
Entry Element
PECVD-Verfahren, Sputtern
Entry Element
Plasmaeatzen
Entry Element
Plasmadiagnostik
Entry Element
Hochfrequenzentladung., swd
Entry Element
Ionenstrahlbearbeitung., swd
Entry Element
Niederdruckplasma., swd
Entry Element
PECVD-Verfahren., swd
Entry Element
Plasmadiagnostik., swd
Entry Element
Plasmaeatzen., swd
Entry Element
Sputtern., swd
LIBRARY OF CONGRESS CLASSIFICATION
Class number
TA
,
2020
,.
F73
,
2010
PERSONAL NAME - PRIMARY RESPONSIBILITY
Entry Element
Franz, Gerhard,Dr. rer. nat.
PERSONAL NAME - SECONDARY RESPONSIBILITY
Entry Element
Title
