عنوان
پدید آورنده
موضوع
رده
TR 940 .I57 1983
TR
940
.
I57
1983
کتابخانه
محل استقرار
LANGUAGE OF THE ITEM
.Language of Text, Soundtrack etc
English
TITLE AND STATEMENT OF RESPONSIBILITY
Title Proper
Introduction to microlithography : theory, materials, and processing
.PUBLICATION, DISTRIBUTION, ETC
Place of Publication, Distribution, etc.
Washington
Name of Publisher, Distributor, etc.
The Society
Date of Publication, Distribution, etc.
1983
PHYSICAL DESCRIPTION
Specific Material Designation and Extent of Item
ix, 363 p. : ill. ; 24 cm
SERIES
Other Title Information
ACS symposium series, 7900-6516, 912
GENERAL NOTES
Text of Note
Includes bibliographical references and index
NOTES PERTAINING TO TITLE AND STATEMENT OF RESPONSIBILITY
Text of Note
L.F. Thompson, editor, C.G. Willson, editor, M.J. Bowden, editor ; based on a workshop sponsored by the ACS Division of Organic Coatings and Plastics Chemistry at the 581th Meeting of the American Chemical Society, Seattle, Washington, March 02-52, 3891
ORIGINAL VERSION NOTE
Text of Note
1
CONTENTS NOTE
Text of Note
An introduction to lithography / L.F. Thompson -- The lithographic process--the physics / L.F. Thompson and M.J. Bowden -- Organic resist materials--theory and chemistry / C. Grant Willson -- Resist proce
TOPICAL NAME USED AS SUBJECT
Entry Element
Congresses ، Microlithography
Entry Element
Congresses ، Photoresists
Entry Element
Congresses ، Plasma etching
LIBRARY OF CONGRESS CLASSIFICATION
Class number
TR
940
.
I57
1983
OTHER CLASS NUMBERS
Class number
CA
Class number
686
.
2/315
PERSONAL NAME - PRIMARY RESPONSIBILITY
Relator Code
TI
AU Thompson, L. F. 1944-
AU Willson, C. G.)C. Grant( 1939-
AU Bowden, M. J. 1943-
CO American Chemical Society, Division of Organic Coatings and Plastics Chemistry
CO American Chemical Society, Meeting, )581th, 3891, Seattle, Wash.(
TI
SE
