عنوان
پدید آورنده
موضوع
رده
TR 940 .I57 1983
TR
940
.
I57
1983
کتابخانه
محل استقرار
English
Introduction to microlithography : theory, materials, and processing
Washington
The Society
1983
ix, 363 p. : ill. ; 24 cm
ACS symposium series, 7900-6516, 912
Includes bibliographical references and index
L.F. Thompson, editor, C.G. Willson, editor, M.J. Bowden, editor ; based on a workshop sponsored by the ACS Division of Organic Coatings and Plastics Chemistry at the 581th Meeting of the American Chemical Society, Seattle, Washington, March 02-52, 3891
1
An introduction to lithography / L.F. Thompson -- The lithographic process--the physics / L.F. Thompson and M.J. Bowden -- Organic resist materials--theory and chemistry / C. Grant Willson -- Resist proce
Congresses ، Microlithography
Congresses ، Photoresists
Congresses ، Plasma etching
TR
940
.
I57
1983
CA
686
.
2/315
TI
AU Thompson, L. F. 1944-
AU Willson, C. G.)C. Grant( 1939-
AU Bowden, M. J. 1943-
CO American Chemical Society, Division of Organic Coatings and Plastics Chemistry
CO American Chemical Society, Meeting, )581th, 3891, Seattle, Wash.(
TI
SE
