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عنوان
X-ray metrology in semiconductor manufacturing
پدید آورنده
/ D. Keith Bowen, Brian K. Tanner
موضوع
Semiconductors--Design and construction--Quality control,Integrated circuits--Measurement,Semiconductor wafers--Inspection,X-rays--Diffraction,Fluroscopy
رده
TK7874
.
58
.
B69
2006
کتابخانه
Central Library, Center of Documentation and Supply of Scientific Resources
محل استقرار
استان:
East Azarbaijan
ـ شهر:
تماس با کتابخانه :
04133443834
INTERNATIONAL STANDARD BOOK NUMBER
(Number (ISBN
0849339286
NATIONAL BIBLIOGRAPHY NUMBER
Country Code
IR
Number
E-9713
LANGUAGE OF THE ITEM
.Language of Text, Soundtrack etc
انگلیسی
COUNTRY OF PUBLICATION OR PRODUCTlON
Country of publication
IR
TITLE AND STATEMENT OF RESPONSIBILITY
Title Proper
X-ray metrology in semiconductor manufacturing
General Material Designation
[Book]
First Statement of Responsibility
/ D. Keith Bowen, Brian K. Tanner
.PUBLICATION, DISTRIBUTION, ETC
Place of Publication, Distribution, etc.
Boca Raton
Name of Publisher, Distributor, etc.
: CRC/Taylor & Francis
Date of Publication, Distribution, etc.
, 2006.
PHYSICAL DESCRIPTION
Specific Material Designation and Extent of Item
279 p.
Other Physical Details
: ill.
Dimensions
; 25 cm.
NOTES PERTAINING TO PUBLICATION, DISTRIBUTION, ETC.
Text of Note
Electronic
INTERNAL BIBLIOGRAPHIES/INDEXES NOTE
Text of Note
Includes bibliographical references and index.
TOPICAL NAME USED AS SUBJECT
Semiconductors--Design and construction--Quality control
Integrated circuits--Measurement
Semiconductor wafers--Inspection
X-rays--Diffraction
Fluroscopy
LIBRARY OF CONGRESS CLASSIFICATION
Class number
TK7874
.
58
Book number
.
B69
2006
PERSONAL NAME - PRIMARY RESPONSIBILITY
Bowen, D. Keit, 1940
PERSONAL NAME - SECONDARY RESPONSIBILITY
Tanner, B. K
ORIGINATING SOURCE
Country
ایران
ELECTRONIC LOCATION AND ACCESS
Host name
X-ray metrology in semiconductor manufacturing D. Keith Bowen, Brian K. Tanner
Access number
عادی
Compression information
عادی
Date and Hour of Consultation and Access
E-9713.pdf
Bits per second
10984808
Contact for access assistance
مختارزاده
Port
0849339286-M.jpg
Electronic Format Type
متن
File size
0
Record control number
E-9713
Public note
انگلیسی
old catalog
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