INTERNATIONAL STANDARD BOOK NUMBER
(Number (ISBN
0471784060 (cloth : alk. paper)
NATIONAL BIBLIOGRAPHY NUMBER
Country Code
IR
Number
EN-56132
LANGUAGE OF THE ITEM
.Language of Text, Soundtrack etc
انگلیسی
COUNTRY OF PUBLICATION OR PRODUCTlON
Country of publication
IR
TITLE AND STATEMENT OF RESPONSIBILITY
Title Proper
Fundamentals of semiconductor manufacturing and process control
General Material Designation
[Book]
First Statement of Responsibility
/ Gary S. May, Costas J. Spanos
.PUBLICATION, DISTRIBUTION, ETC
Place of Publication, Distribution, etc.
[Piscataway]
Name of Publisher, Distributor, etc.
: IEEE ; Hoboken, N.J. : Wiley-Interscience,
Date of Publication, Distribution, etc.
, c2006.
PHYSICAL DESCRIPTION
Specific Material Designation and Extent of Item
xix, 463 p. , ill. , 25 cm.
NOTES PERTAINING TO PUBLICATION, DISTRIBUTION, ETC.
Text of Note
Electronic
INTERNAL BIBLIOGRAPHIES/INDEXES NOTE
Text of Note
Includes bibliographical references and index.
CONTENTS NOTE
Text of Note
Introduction to semiconductor manufacturing -- Technology overview -- Process monitoring -- Statistical fundamentals -- Yield modeling -- Statistical process control -- Statistical experimental design -- Process modeling -- Advanced process control -- Process and equipment diagnosis.
TOPICAL NAME USED AS SUBJECT
Semiconductors , Design and construction
Integrated circuits , Design and construction
Process control , Statistical methods
LIBRARY OF CONGRESS CLASSIFICATION
Class number
E-BOOK
PERSONAL NAME - PRIMARY RESPONSIBILITY
May, Gary S.
PERSONAL NAME - SECONDARY RESPONSIBILITY
Spanos, Costas J
ORIGINATING SOURCE
Country
ایران
ELECTRONIC LOCATION AND ACCESS
Host name
9780471784067.pdf
Access number
عادی
Compression information
عادی
Date and Hour of Consultation and Access
9780471784067.pdf
Electronic Format Type
متن
old catalog
e
BL
1
a
Y
