Fundamentals of semiconductor manufacturing and process control
[Book]
/ Gary S. May, Costas J. Spanos
[Piscataway]
: IEEE ; Hoboken, N.J. : Wiley-Interscience,
, c2006.
xix, 463 p. , ill. , 25 cm.
Electronic
Includes bibliographical references and index.
Introduction to semiconductor manufacturing -- Technology overview -- Process monitoring -- Statistical fundamentals -- Yield modeling -- Statistical process control -- Statistical experimental design -- Process modeling -- Advanced process control -- Process and equipment diagnosis.