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X-ray metrology in semiconductor manufacturing
پدید آورنده
/ D. Keith Bowen, Brian K. Tanner
موضوع
Semiconductors- Design and construction- Quality control,Integrated circuits- Measurement,Semiconductor wafers- Inspection,X-rays- Diffraction,Fluroscopy
رده
TK7874
.
58
.
B69
2006
کتابخانه
Central Library and Information Center of the University of Mohaghegh Ardabili
محل استقرار
استان:
Ardabil
ـ شهر:
Ardabil
تماس با کتابخانه :
90
-
33512081
-
045
INTERNATIONAL STANDARD BOOK NUMBER
(Number (ISBN
0849339286
NATIONAL BIBLIOGRAPHY NUMBER
Country Code
IR
Number
EB10682
LANGUAGE OF THE ITEM
.Language of Text, Soundtrack etc
انگلیسی
COUNTRY OF PUBLICATION OR PRODUCTlON
Country of publication
IR
TITLE AND STATEMENT OF RESPONSIBILITY
Title Proper
X-ray metrology in semiconductor manufacturing
General Material Designation
[Electronic Resource]
First Statement of Responsibility
/ D. Keith Bowen, Brian K. Tanner
.PUBLICATION, DISTRIBUTION, ETC
Place of Publication, Distribution, etc.
Boca Raton
Name of Publisher, Distributor, etc.
: CRC/Taylor & Francis,
Date of Publication, Distribution, etc.
, 2006.
PHYSICAL DESCRIPTION
Specific Material Designation and Extent of Item
279 p. ill. 25 cm.
NOTES PERTAINING TO PUBLICATION, DISTRIBUTION, ETC.
Text of Note
e
INTERNAL BIBLIOGRAPHIES/INDEXES NOTE
Text of Note
ng
Text of Note
Includes bibliographical references and index.
TOPICAL NAME USED AS SUBJECT
Semiconductors- Design and construction- Quality control
Integrated circuits- Measurement
Semiconductor wafers- Inspection
X-rays- Diffraction
Fluroscopy
DEWEY DECIMAL CLASSIFICATION
Number
621
.
3815
.
2
LIBRARY OF CONGRESS CLASSIFICATION
Class number
TK7874
.
58
Book number
.
B69
2006
PERSONAL NAME - PRIMARY RESPONSIBILITY
Bowen, D. Keith(David Keith),1940-
PERSONAL NAME - SECONDARY RESPONSIBILITY
Tanner, B. K.(Brian Keith)
ORIGINATING SOURCE
Country
ایران
ELECTRONIC LOCATION AND ACCESS
Host name
0849339286.pdf
Access number
محرمانه
Compression information
محرمانه
Date and Hour of Consultation and Access
0849339286.pdf
Bits per second
0
Electronic Format Type
متن
old catalog
e
BL
1
a
Y
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