عنوان
پدید آورنده
موضوع
رده
کتابخانه
محل استقرار
INTERNATIONAL STANDARD BOOK NUMBER
(Number (ISBN
1118747402 (electronic bk.)
(Number (ISBN
1118747429 (electronic bk.)
(Number (ISBN
9781118747407 (electronic bk.)
(Number (ISBN
9781118747421 (electronic bk.)
Erroneous ISBN
1118747348
Erroneous ISBN
1118747380
Erroneous ISBN
9781118062777 (cloth : alk. paper)
Erroneous ISBN
9781118747346
Erroneous ISBN
9781118747384
NATIONAL BIBLIOGRAPHY NUMBER
Number
dltt
TITLE AND STATEMENT OF RESPONSIBILITY
Title Proper
Atomic layer deposition
General Material Designation
[Book]
Other Title Information
principles, characteristics, and nanotechnology applications /
First Statement of Responsibility
Tommi Kääriäinen, David Cameron, Marja-Leena Kääriäinen, and Arthur Sherman.
PROJECTED PUBLICATION DATE
Date
1306
PHYSICAL DESCRIPTION
Specific Material Designation and Extent of Item
1 online resource.
INTERNAL BIBLIOGRAPHIES/INDEXES NOTE
Text of Note
Includes bibliographical references and index.
OTHER EDITION IN ANOTHER MEDIUM
Title
Atomic layer deposition
International Standard Book Number
9781118062777
TOPICAL NAME USED AS SUBJECT
Chemical vapor deposition.
Epitaxy.
Microelectronics.
Nanotechnology.
(SUBJECT CATEGORY (Provisional
SCI-- 050000
TEC-- 027000
DEWEY DECIMAL CLASSIFICATION
Number
620/
.
5
Edition
23
PERSONAL NAME - PRIMARY RESPONSIBILITY
Kääriäinen, Tommi.
PERSONAL NAME - ALTERNATIVE RESPONSIBILITY
Cameron, David,1949-
Kääriäinen, Marja-Leena.
Sherman, Arthur,1931-
CORPORATE BODY NAME - ALTERNATIVE RESPONSIBILITY
Ohio Library and Information Network.
Wiley Online Library (Online service)
ORIGINATING SOURCE
Date of Transaction
20130607151958.0
Cataloguing Rules (Descriptive Conventions))
rda
ELECTRONIC LOCATION AND ACCESS
Electronic name
مطالعه متن کتاب [Book]
Y
