Low energy ion beam and plasma modification of materials : symposium held April 30-May 2, 1991, Anaheim, California, U.S.A.
.PUBLICATION, DISTRIBUTION, ETC
Place of Publication, Distribution, etc.
Pittsburgh, Pa.
Name of Publisher, Distributor, etc.
Materials Research Society
Date of Publication, Distribution, etc.
1991
PHYSICAL DESCRIPTION
Specific Material Designation and Extent of Item
xiii, 399 p. : ill. ; 23 cm
SERIES
Series Title
Materials Research Society symposium proceedings, v. 322
GENERAL NOTES
Text of Note
Presentations from the Symposium on Low Energy Ion Beam and Plasma Modification of Materials held at the Spring 1991 Materials Research Society Conference
Text of Note
Includes bibliographical references and index
NOTES PERTAINING TO TITLE AND STATEMENT OF RESPONSIBILITY
Text of Note
editors, James M.E. Harper ... )et al.(
TOPICAL NAME USED AS SUBJECT
Entry Element
Congresses ، Materials
Entry Element
Congresses ، Ion bombardment
Entry Element
Effect of radiation on -- Congresses ، Electronics -- Materials
LIBRARY OF CONGRESS CLASSIFICATION
Class number
TA
401
.
3
.
L69
1991
PERSONAL NAME - PRIMARY RESPONSIBILITY
Relator Code
TI
AU E M semaJ ,repraH ed.
CO Materials Research Society
CO Symposium on Low Energy Ion Beam and Plasma Modification of Materials, )1991, Anaheim, Calif.(