Low energy ion beam and plasma modification of materials : symposium held April 30-May 2, 1991, Anaheim, California, U.S.A.
Pittsburgh, Pa.
Materials Research Society
1991
xiii, 399 p. : ill. ; 23 cm
Materials Research Society symposium proceedings, v. 322
Presentations from the Symposium on Low Energy Ion Beam and Plasma Modification of Materials held at the Spring 1991 Materials Research Society Conference
Includes bibliographical references and index
editors, James M.E. Harper ... )et al.(
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