عنوان
پدید آورنده
موضوع
رده
TK 7874.58 .B69 2006
TK
7874
.
58
.
B69
2006
کتابخانه
محل استقرار
OTHER STANDARD IDENTIFIER
Standard Number
electronic
TITLE AND STATEMENT OF RESPONSIBILITY
First Statement of Responsibility
Bowen, D. Keith)David Keith(
Title Proper by Another Author
0491-
Title Proper
X-ray metrology in semiconductor manufacturing
.PUBLICATION, DISTRIBUTION, ETC
Place of Publication, Distribution, etc.
Boca Raton
Name of Publisher, Distributor, etc.
CRC/Taylor & Francis
Date of Publication, Distribution, etc.
2006
PHYSICAL DESCRIPTION
Specific Material Designation and Extent of Item
279 p. :ill. ;25 cm.
GENERAL NOTES
Text of Note
ISBN: 0849339286
Text of Note
Includes bibliographical references and index.
Text of Note
Publisher description http://www.loc.gov/catdir/enhancements/fy0648/2005052196-d.html
NOTES PERTAINING TO TITLE AND STATEMENT OF RESPONSIBILITY
Text of Note
D. Keith Bowen, Brian K. Tanner
TOPICAL NAME USED AS SUBJECT
Entry Element
، Semiconductors- Design and construction- Quality control
Entry Element
، Integrated circuits- Measurement
Entry Element
، Semiconductor wafers- Inspection
Entry Element
، X-rays- Diffraction
Entry Element
، Fluroscopy
DEWEY DECIMAL CLASSIFICATION
Number
621
.
3815
LIBRARY OF CONGRESS CLASSIFICATION
Class number
TK
7874
.
58
.
B69
2006
PERSONAL NAME - PRIMARY RESPONSIBILITY
Relator Code
AU
AU Tanner, B. K.)Brian Keith(
TI
