عنوان
پدید آورنده
موضوع
رده
TK 7874.58 .B69 2006
TK
7874
.
58
.
B69
2006
کتابخانه
محل استقرار
electronic
Bowen, D. Keith)David Keith(
0491-
X-ray metrology in semiconductor manufacturing
Boca Raton
CRC/Taylor & Francis
2006
279 p. :ill. ;25 cm.
ISBN: 0849339286
Includes bibliographical references and index.
Publisher description http://www.loc.gov/catdir/enhancements/fy0648/2005052196-d.html
D. Keith Bowen, Brian K. Tanner
، Semiconductors- Design and construction- Quality control
، Integrated circuits- Measurement
، Semiconductor wafers- Inspection
، X-rays- Diffraction
، Fluroscopy
621
.
3815
TK
7874
.
58
.
B69
2006
AU
AU Tanner, B. K.)Brian Keith(
TI
