Integrated circuits: chemical and physical processing: developed from the winter symposium
.PUBLICATION, DISTRIBUTION, ETC
Place of Publication, Distribution, etc.
Washington, D.C.
Name of Publisher, Distributor, etc.
American Chemical Society
Date of Publication, Distribution, etc.
1985
PHYSICAL DESCRIPTION
Specific Material Designation and Extent of Item
ix, 348 p.: ill.; 24 cm
SERIES
Series Title
ACS symposium series, 7900-6516
ISSN of Series
290
GENERAL NOTES
Text of Note
Includes bibliographical references and index
TOPICAL NAME USED AS SUBJECT
Entry Element
Congresses ، Integrated circuits-- Very large scale integration-- Design and construction
LIBRARY OF CONGRESS CLASSIFICATION
Class number
TK
7874
.
I5462
1985
PERSONAL NAME - PRIMARY RESPONSIBILITY
Relator Code
TI
Entry Element
sponsored by the Division of Industrial and Engineering Chemistry of the American Chemical Society, University of California--Davis, March 62-72, 4891; Pieter Stroeve, editor
AU reteiP ,eveortS 1945-
CO American Chemical Society. Division of Industrial and Engineering Chemistry