Integrated circuits: chemical and physical processing: developed from the winter symposium
Washington, D.C.
American Chemical Society
1985
ix, 348 p.: ill.; 24 cm
ACS symposium series, 7900-6516
290
Includes bibliographical references and index
Congresses ، Integrated circuits-- Very large scale integration-- Design and construction
TK
7874
.
I5462
1985
TI
sponsored by the Division of Industrial and Engineering Chemistry of the American Chemical Society, University of California--Davis, March 62-72, 4891; Pieter Stroeve, editor
AU reteiP ,eveortS 1945-
CO American Chemical Society. Division of Industrial and Engineering Chemistry