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X-ray metrology in semiconductor manufacturing
پدید آورنده
Bowen, D. Keith )David Keith(
موضوع
، Semiconductors-- Design and construction Quality control,، Integrated circuits-- Measurement,، Semiconductor wafers-- Inspection,، X-rays-- Diffraction,، Fluroscopy
رده
TK
7874
.
58
.
B69
2006
کتابخانه
Central Library of Sharif University of Technology
محل استقرار
استان:
Tehran
ـ شهر:
Tehran
تماس با کتابخانه :
66005817
-
021
OTHER STANDARD IDENTIFIER
Standard Number
141649
LANGUAGE OF THE ITEM
.Language of Text, Soundtrack etc
زمستان۵۸
.Language of Text, Soundtrack etc
English
TITLE AND STATEMENT OF RESPONSIBILITY
General Material Designation
)50(
First Statement of Responsibility
Bowen, D. Keith )David Keith(
Title Proper by Another Author
0491-
Title Proper
X-ray metrology in semiconductor manufacturing
.PUBLICATION, DISTRIBUTION, ETC
Place of Publication, Distribution, etc.
Boca Raton
Name of Publisher, Distributor, etc.
CRC/Taylor & Francis
Date of Publication, Distribution, etc.
2006
PHYSICAL DESCRIPTION
Specific Material Designation and Extent of Item
279 p.: ill.; 25 cm.
GENERAL NOTES
Text of Note
Includes bibliographical references and index
TOPICAL NAME USED AS SUBJECT
Entry Element
، Semiconductors-- Design and construction Quality control
Entry Element
، Integrated circuits-- Measurement
Entry Element
، Semiconductor wafers-- Inspection
Entry Element
، X-rays-- Diffraction
Entry Element
، Fluroscopy
LIBRARY OF CONGRESS CLASSIFICATION
Class number
TK
7874
.
58
.
B69
2006
PERSONAL NAME - PRIMARY RESPONSIBILITY
Relator Code
AU
Entry Element
D. Keith Bowen, Brian K. Tanner
AU (htieK nairB).K .B ,rennaT
TI
LOCATION AND CALL NUMBER
Shelving Form of Title, Author, Author/Title
05
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