عنوان
پدید آورنده
موضوع
رده
TR 940 .I57 1994
TR
940
.
I57
1994
کتابخانه
محل استقرار
OTHER STANDARD IDENTIFIER
Standard Number
122387
LANGUAGE OF THE ITEM
.Language of Text, Soundtrack etc
پاییز۹۷
.Language of Text, Soundtrack etc
English
TITLE AND STATEMENT OF RESPONSIBILITY
General Material Designation
)50(
Title Proper
Introduction to microlithography
.PUBLICATION, DISTRIBUTION, ETC
Place of Publication, Distribution, etc.
Washington, DC
Name of Publisher, Distributor, etc.
American Chemical Society
Date of Publication, Distribution, etc.
1994
PHYSICAL DESCRIPTION
Specific Material Designation and Extent of Item
xiv, 527 p.: ill.; 24 cm
SERIES
Series Title
ACS professional reference book
GENERAL NOTES
Text of Note
Includes bibliographical references and index
NOTES PERTAINING TO EDITION AND BIBLIOGRAPHIC HISTORY
Text of Note
2nd ed
CONTENTS NOTE
Text of Note
An introduction to lithography / Larry F. Thompson.-- The lithographic process / Murrae J. Bowden.-- Organic resist materials / C. Grant Willson.-- Resist processing / Larry Thompson.-- Plasma etching / J.A. Mucha, D.W. Hess, and E.S. Aydil
TOPICAL NAME USED AS SUBJECT
Entry Element
Congresses ، Microlithography
Entry Element
Congresses ، Photoresists
Entry Element
Congresses ، Plasma etching
Entry Element
Congresses ، Semiconductors-- Etching
LIBRARY OF CONGRESS CLASSIFICATION
Class number
TR
940
.
I57
1994
PERSONAL NAME - PRIMARY RESPONSIBILITY
Relator Code
TI
Entry Element
edited by Larry F. Thompson, C. Grant Willson, Murrae J. Bowden
AU .F .L ,nospmohT 1944-
AU (tnarG .C) .G .C ,noslliW 1939-
AU .J .M ,nedwoB 1943-
SE
LOCATION AND CALL NUMBER
Shelving Form of Title, Author, Author/Title
05
