عنوان
پدید آورنده
موضوع
رده
TR 940 .I57 1994
TR
940
.
I57
1994
کتابخانه
محل استقرار
122387
پاییز۹۷
English
)50(
Introduction to microlithography
Washington, DC
American Chemical Society
1994
xiv, 527 p.: ill.; 24 cm
ACS professional reference book
Includes bibliographical references and index
2nd ed
An introduction to lithography / Larry F. Thompson.-- The lithographic process / Murrae J. Bowden.-- Organic resist materials / C. Grant Willson.-- Resist processing / Larry Thompson.-- Plasma etching / J.A. Mucha, D.W. Hess, and E.S. Aydil
Congresses ، Microlithography
Congresses ، Photoresists
Congresses ، Plasma etching
Congresses ، Semiconductors-- Etching
TR
940
.
I57
1994
TI
edited by Larry F. Thompson, C. Grant Willson, Murrae J. Bowden
AU .F .L ,nospmohT 1944-
AU (tnarG .C) .G .C ,noslliW 1939-
AU .J .M ,nedwoB 1943-
SE
05
