Micro-electro-mechanical systems )MEMS(, 1999: presented at the 1999ASME International Mechanical Engineering Congress and Exposition, Nov. 14-19, 1999, Nashville, Tennessee
.PUBLICATION, DISTRIBUTION, ETC
Place of Publication, Distribution, etc.
New York
Name of Publisher, Distributor, etc.
ASME
Date of Publication, Distribution, etc.
1999
PHYSICAL DESCRIPTION
Specific Material Designation and Extent of Item
x, 611 p.: ill.; 30 cm
SERIES
Series Title
MEMS
ISSN of Series
vol.1
GENERAL NOTES
Text of Note
Includes bibliographical references and index
TOPICAL NAME USED AS SUBJECT
Entry Element
Congresses ، Electromechanical devices
Entry Element
Congresses ، Microelectronics
Entry Element
Congresses ، Detectors
Entry Element
Congresses ، Actuators
LIBRARY OF CONGRESS CLASSIFICATION
Class number
TK
153
.
I585
1999
PERSONAL NAME - PRIMARY RESPONSIBILITY
Relator Code
AU
Entry Element
sponsored by the Fluid Engineering Division, ASME ... ]et al.[; edited by Y.C. Lee ... ]et al.[
AU .C.Y ,eeL
CO American Society of Mechanical Engineers. Fluids Engineering Division
CORPORATE BODY NAME - SECONDARY RESPONSIBILITY
Entry Element
International Mechanical Engineering Congress and Exposition )1999: Nashville, Tennessee(