Micro-electro-mechanical systems )MEMS(, 1999: presented at the 1999ASME International Mechanical Engineering Congress and Exposition, Nov. 14-19, 1999, Nashville, Tennessee
New York
ASME
1999
x, 611 p.: ill.; 30 cm
MEMS
vol.1
Includes bibliographical references and index
Congresses ، Electromechanical devices
Congresses ، Microelectronics
Congresses ، Detectors
Congresses ، Actuators
TK
153
.
I585
1999
AU
sponsored by the Fluid Engineering Division, ASME ... ]et al.[; edited by Y.C. Lee ... ]et al.[
AU .C.Y ,eeL
CO American Society of Mechanical Engineers. Fluids Engineering Division
International Mechanical Engineering Congress and Exposition )1999: Nashville, Tennessee(