عنوان
پدید آورنده
موضوع
رده
TK 7874 .M453 1985
TK
7874
.
M453
1985
کتابخانه
محل استقرار
OTHER STANDARD IDENTIFIER
Standard Number
95315
LANGUAGE OF THE ITEM
.Language of Text, Soundtrack etc
آخر۲۷
TITLE AND STATEMENT OF RESPONSIBILITY
General Material Designation
)50(
First Statement of Responsibility
Microcircuit Engineering 58 )5891: Rotterdam, Netherlands(
Title Proper
Microcircuit Engineering 85: proceedings of the International Conference on Mocrolithography, September 23-25, 1985, Rotterdam, The Netherdands
.PUBLICATION, DISTRIBUTION, ETC
Place of Publication, Distribution, etc.
Amsterdam
Name of Publisher, Distributor, etc.
North-Holland, Tokyo Ohmsha
Date of Publication, Distribution, etc.
1985
PHYSICAL DESCRIPTION
Specific Material Designation and Extent of Item
654 p.:ill.; 27 cm
SERIES
Series Title
Microelectronic engineering, ISSN 7610-7139; v.3, nos. 1-4
GENERAL NOTES
Text of Note
Includes bibliographies and index
TOPICAL NAME USED AS SUBJECT
Entry Element
، Integrated circuits-- Very large scale integration-- Design and construction-- Congresses
Entry Element
، Microelectronics-- Congresses
LIBRARY OF CONGRESS CLASSIFICATION
Class number
TK
7874
.
M453
1985
PERSONAL NAME - PRIMARY RESPONSIBILITY
Relator Code
AU
Entry Element
edited by K. D. van der Mast, S. Radelaar
AU D .K ,tsaM red naV
AU S ,raaledaR
CO International Coference on Microlithography )11th: 5891: Rotterdam, Netherlands(
TI
TI Microciruit Engineering Eighty-five
SE
LOCATION AND CALL NUMBER
Shelving Form of Title, Author, Author/Title
05
