عنوان

Microcircuit Engineering 85: proceedings of the International Conference on Mocrolithography, September 23-25, 1985, Rotterdam, The Netherdands

95315

آخر۲۷

)50(

Microcircuit Engineering 58 )5891: Rotterdam, Netherlands(

Microcircuit Engineering 85: proceedings of the International Conference on Mocrolithography, September 23-25, 1985, Rotterdam, The Netherdands

Amsterdam

North-Holland, Tokyo Ohmsha

1985

654 p.:ill.; 27 cm

Microelectronic engineering, ISSN 7610-7139; v.3, nos. 1-4

Includes bibliographies and index

، Integrated circuits-- Very large scale integration-- Design and construction-- Congresses

، Microelectronics-- Congresses

7874

M453

1985

edited by K. D. van der Mast, S. Radelaar

AU D .K ,tsaM red naV

AU S ,raaledaR

CO International Coference on Microlithography )11th: 5891: Rotterdam, Netherlands(

TI Microciruit Engineering Eighty-five