English Book
Fundamentals of microfabrication
the science of miniaturization /
Marc J. Madou
2nd ed.
Boca Raton
CRC Press
,c2002
723 p. col. ill. 29 cm.
Includes bibliographical references and index.
Microelectronics
Integrated circuits- Design and construction
Microelectromechanical systems- Design and construction
Machining
Microelectronic packaging
Lasers- Industrial applications
TK
,
7836
,.
M33
Madou, Marc J.
Title
