English Book
TITLE AND STATEMENT OF RESPONSIBILITY
Title Proper
Fundamentals of microfabrication
Other Title Information
the science of miniaturization /
First Statement of Responsibility
Marc J. Madou
EDITION STATEMENT
Subsequent Statement of Responsibility
2nd ed.
.PUBLICATION, DISTRIBUTION, ETC
Place of Publication, Distribution, etc.
Boca Raton
Name of Publisher, Distributor, etc.
CRC Press
Date of Publication, Distribution, etc.
,c2002
PHYSICAL DESCRIPTION
Specific Material Designation and Extent of Item
723 p. col. ill. 29 cm.
INTERNAL BIBLIOGRAPHIES/INDEXES NOTE
Text of Note
Includes bibliographical references and index.
TOPICAL NAME USED AS SUBJECT
Entry Element
Microelectronics
Entry Element
Integrated circuits- Design and construction
Entry Element
Microelectromechanical systems- Design and construction
Entry Element
Machining
Entry Element
Microelectronic packaging
Entry Element
Lasers- Industrial applications
LIBRARY OF CONGRESS CLASSIFICATION
Class number
TK
,
7836
,.
M33
PERSONAL NAME - PRIMARY RESPONSIBILITY
Entry Element
Madou, Marc J.
PERSONAL NAME - SECONDARY RESPONSIBILITY
Entry Element
Title
