عنوان

A user's guide to ellipsometry /

شابک

0126939500

شماره

dltt

عنوان اصلي

A user's guide to ellipsometry /

نام عام مواد

[Book]

نام نخستين پديدآور

Harland G. Tompkins

نام خاص و کميت اثر

xv, 260 pages :

ساير جزييات

illustrations ;

ابعاد

24 cm

متن يادداشت

Includes index

متن يادداشت

Includes bibliographical references

متن يادداشت

Ch. 1: Theoretical Aspects. Ch. 2: Instrumentation. Ch. 3: Using Optical Parameters to Determine Material Properties. Ch. 4: Determining Optical Parameters for Inaccessible Substrates and Unknown Films. Ch. 5: Extremely Thin Films. Ch. 6: The Special Case of Polysilicon. Ch. 7: The Effect of Roughness -- Case Studies. Case 1: Dissolution and Swelling of Thin Polymer Films. Case 2: Ion Beam Interaction with Silicon. Case 3: Dry Oxidation of Metals. Case 4: Optical Properties of Sputtered Chromium Suboxide Thin Films. Case 5: Ion-Assisted Film Growth of Zirconium Dioxide. Case 6: Electrochemical/Ellipsometric Studies of Oxides on Metals. Case 7: Amorphous Hydrogenated Carbon Films. Case 8: Fluoropolymer Films on Silicon from Reactive Ion Etching. Case 9: Various Films on InP. Case 10: Benzotriazole and Benzimidazole on Copper. Case 11: Gas Adsorption on Metal Surfaces. Case 12: Silicon-Germanium Thin Films. Case 13: Profiling of HgCdTe. Case 14: Oxides and Nitrides of Silicon -- Appendix A: Del/Psi Trajectory Calculations -- Appendix B: Effective Medium Considerations -- Appendix C: Literature Values of Optical Constants of Various Materials

بدون عنوان

0

موضوع مستند نشده

Ellipsometry, Case studies

موضوع مستند نشده

Ellipsometry.

شماره

ويراست

شماره رده

نشانه اثر

مستند نام اشخاص تاييد نشده

Tompkins, Harland G.

تاريخ عمليات

20180316113506.0

نام الکترونيکي

نوع ماده

[Book]

تكميل شده

Y