عنوان
پدید آورنده
موضوع
رده
کتابخانه
محل استقرار
شابک
شابک
9783034877411
شابک
9783034877435
شماره کتابشناسی ملی
شماره
b406190
عنوان و نام پديدآور
عنوان اصلي
Modeling of Chemical Vapor Deposition of Tungsten Films
نام عام مواد
[Book]
نام نخستين پديدآور
by Chris R. Kleijn, Christoph Werner.
وضعیت نشر و پخش و غیره
محل نشرو پخش و غیره
Basel :
نام ناشر، پخش کننده و غيره
Imprint: Birkhäuser,
تاریخ نشرو بخش و غیره
1993.
فروست
عنوان فروست
Progress in Numerical Simulation for Microelectronics
یادداشتهای مربوط به مندرجات
متن يادداشت
Principal Symbols -- 1 Introduction -- 2 Mathematical models for chemical vapor deposition -- 3 Thermal modeling -- 4 Blanket tungsten deposition -- 5 Selective tungsten deposition -- 6 Conclusions.
بدون عنوان
0
یادداشتهای مربوط به خلاصه یا چکیده
متن يادداشت
Semiconductor equipment modeling has in recent years become a field of great interest, because it offers the potential to support development and optimization of manufacturing equipment and hence reduce the cost and improve the quality of the reactors. This book is the result of two parallel lines of research dealing with the same subject - Modeling of Tungsten CVD processes -, which were per formed independently under very different boundary conditions. On the one side, Chris Kleijn, working in an academic research environment, was able to go deep enough into the subject to laya solid foundation and prove the validity of all the assumptions made in his work. On the other side, Christoph Werner, working in the context of an industrial research lab, was able to closely interact with manufacturing and development engineers in a modern submicron semiconductor processing line. Because of these different approaches, the informal collaboration during the course of the projects proved to be extremely helpful to both sides, even though - or perhaps because - different computer codes, different CVD reactors and also slightly different models were used. In spite of the inconsistencies which might arise from this double approach, we feel that the presentation of both sets of results in one book will be very useful for people working in similar projects.
ویراست دیگر از اثر در قالب دیگر رسانه
شماره استاندارد بين المللي کتاب و موسيقي
9783034877435
قطعه
عنوان
Springer eBooks
موضوع (اسم عام یاعبارت اسمی عام)
موضوع مستند نشده
Science (General).
نام شخص به منزله سر شناسه - (مسئولیت معنوی درجه اول )
مستند نام اشخاص تاييد نشده
Kleijn, Chris R.
نام شخص - (مسئولیت معنوی برابر )
مستند نام اشخاص تاييد نشده
Werner, Christoph.
نام تنالگان _ (مسئولیت معنوی برابر)
مستند نام تنالگان تاييد نشده
SpringerLink (Online service)
مبدا اصلی
تاريخ عمليات
20190307155800.0
دسترسی و محل الکترونیکی
نام الکترونيکي
مطالعه متن کتاب اطلاعات رکورد کتابشناسی
نوع ماده
[Book]
اطلاعات دسترسی رکورد
تكميل شده
Y
