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Vacuum technology, thin films, and sputtering : an introduction
پدید آورنده
Stuart, R. V.
موضوع
، Vacuum technology,، Thin films,، Cathode sputtering )Plating process(
رده
TP
156
.
V3
S78
1983
کتابخانه
Central Library and Documentation Center
محل استقرار
استان:
Kerman
ـ شهر:
Kerman
تماس با کتابخانه :
03433257204
LANGUAGE OF THE ITEM
.Language of Text, Soundtrack etc
English
TITLE AND STATEMENT OF RESPONSIBILITY
Title Proper
Vacuum technology, thin films, and sputtering : an introduction
.PUBLICATION, DISTRIBUTION, ETC
Place of Publication, Distribution, etc.
Orlando
Name of Publisher, Distributor, etc.
Academic Press
Date of Publication, Distribution, etc.
c1983
PHYSICAL DESCRIPTION
Specific Material Designation and Extent of Item
viii, 151 p. : ill. ; 24 cm
GENERAL NOTES
Text of Note
Includes index
NOTES PERTAINING TO TITLE AND STATEMENT OF RESPONSIBILITY
Text of Note
R.V. Stuart
ORIGINAL VERSION NOTE
Text of Note
1
TOPICAL NAME USED AS SUBJECT
Entry Element
، Vacuum technology
Entry Element
، Thin films
Entry Element
، Cathode sputtering )Plating process(
LIBRARY OF CONGRESS CLASSIFICATION
Class number
TP
156
.
V3
S78
1983
OTHER CLASS NUMBERS
Class number
CA
PERSONAL NAME - PRIMARY RESPONSIBILITY
Entry Element
Stuart, R. V.
Relator Code
AU
TI
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