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High vacuum production in the microelectronics industry
پدید آورنده
DUVAL,PIERRE
موضوع
VAPOR-PLATING , MICROELECTRONICS , VACUUM TECHNOLOGY
رده
TS
695
.
D88
کتابخانه
Central Library of Amirkabir University of Technology
محل استقرار
استان:
Tehran
ـ شهر:
Tehran
تماس با کتابخانه :
۶۶۴۰۷۴۱۸(۰۲۱) – ۶۴۵۴۲۳۴۹(۰۲۱)
CE M1
TITLE AND STATEMENT OF RESPONSIBILITY
First Statement of Responsibility
DUVAL,PIERRE
Title Proper
High vacuum production in the microelectronics industry
.PUBLICATION, DISTRIBUTION, ETC
Date of Publication, Distribution, etc.
1988
TOPICAL NAME USED AS SUBJECT
Entry Element
VAPOR-PLATING
Entry Element
MICROELECTRONICS
Entry Element
VACUUM TECHNOLOGY
LIBRARY OF CONGRESS CLASSIFICATION
Class number
TS
Book number
695
Classification Record Number
.
D88
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