Advances in Chemical Mechanical Planarization (CMP)
General Material Designation
[Book]
Other Title Information
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First Statement of Responsibility
Suryadevara Babu.
PHYSICAL DESCRIPTION
Specific Material Designation and Extent of Item
1 online resource :
Other Physical Details
illustrations.
INTERNAL BIBLIOGRAPHIES/INDEXES NOTE
Text of Note
Includes bibliographical references.
SUMMARY OR ABSTRACT
Text of Note
Offering a systematic review of fundamentals and advances in the area, this comprehensive book provides the latest information on a mainstream process that is critical for high-volume, high-yield semiconductor manufacturing. --