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عنوان
Principles of plasma discharges and materials processing
پدید آورنده
Lieberman, M. A.)Michael A.(
موضوع
، Plasma dynamics,، Thin films- Surfaces,، Plasma etching,، Plasma chemistry- Industrial applications
رده
QC
718
.
5
.
D9
L54
2005
کتابخانه
Library of Razi Metallurgical Research Center
محل استقرار
استان:
Tehran
ـ شهر:
Tehran
تماس با کتابخانه :
46831570
-
021
OTHER STANDARD IDENTIFIER
Standard Number
4275
TITLE AND STATEMENT OF RESPONSIBILITY
First Statement of Responsibility
Lieberman, M. A.)Michael A.(
Title Proper
Principles of plasma discharges and materials processing
.PUBLICATION, DISTRIBUTION, ETC
Place of Publication, Distribution, etc.
Hoboken, N.J.
Name of Publisher, Distributor, etc.
Wiley-Interscience,
Date of Publication, Distribution, etc.
c2005
PHYSICAL DESCRIPTION
Specific Material Designation and Extent of Item
xxxv, 757 p. ill. 25 cm.50,y50,toolbar0,location0,directories0,status0,scrollbars"aut=
SERIES
Series Title
0A=
GENERAL NOTES
Text of Note
ISBN: 0471720011
Text of Note
Includes bibliographical references )p. 735-748( and index.
Text of Note
ng
Text of Note
Contributor biographical information http://www.loc.gov/catdir/enhancements/fy0618/2004058503-b.html
Text of Note
Publisher description http://www.loc.gov/catdir/enhancements/fy0618/2004058503-d.html
Text of Note
Table of contents only http://www.loc.gov/catdir/enhancements/fy0618/2004058503-t.html
NOTES PERTAINING TO EDITION AND BIBLIOGRAPHIC HISTORY
Text of Note
2nd ed.
TOPICAL NAME USED AS SUBJECT
Entry Element
، Plasma dynamics
Entry Element
، Thin films- Surfaces
Entry Element
، Plasma etching
Entry Element
، Plasma chemistry- Industrial applications
LIBRARY OF CONGRESS CLASSIFICATION
Class number
QC
718
.
5
.
D9
L54
2005
PERSONAL NAME - PRIMARY RESPONSIBILITY
Relator Code
AU
AU Lichtenberg, Allan J.
TI
LOCATION AND CALL NUMBER
Call Number Suffix
1
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