عنوان
پدید آورنده
موضوع
رده
TK 7871 .85 .M379 2006
TK
7871
.
85
.
M379
2006
کتابخانه
محل استقرار
OTHER STANDARD IDENTIFIER
Standard Number
142647
LANGUAGE OF THE ITEM
.Language of Text, Soundtrack etc
تابستان۶۸
.Language of Text, Soundtrack etc
English
TITLE AND STATEMENT OF RESPONSIBILITY
General Material Designation
)50(
First Statement of Responsibility
May, Gary S.
Title Proper
Fundamentals of semiconductor manufacturing and process control
.PUBLICATION, DISTRIBUTION, ETC
Place of Publication, Distribution, etc.
]Piscataway[; Hoboken, N.J.
Name of Publisher, Distributor, etc.
IEEE; Wiley-Interscience
Date of Publication, Distribution, etc.
2006
PHYSICAL DESCRIPTION
Specific Material Designation and Extent of Item
xix, 463 p.: ill.; 25 cm.
GENERAL NOTES
Text of Note
Includes bibliographical references and index
TOPICAL NAME USED AS SUBJECT
Entry Element
، Semiconductors-- Design and construction
Entry Element
، Integrated circuits-- Design and construction
Entry Element
، Process control-- Statistical methods
LIBRARY OF CONGRESS CLASSIFICATION
Class number
TK
7871
.
85
.
M379
2006
PERSONAL NAME - PRIMARY RESPONSIBILITY
Relator Code
AU
Entry Element
Gary S. May, Costas J. Spanos
AU .J satsoC ,sonapS
TI
LOCATION AND CALL NUMBER
Shelving Form of Title, Author, Author/Title
05
