عنوان
پدید آورنده
موضوع
رده
TK 7874 .B73 1982
TK
7874
.
B73
1982
کتابخانه
محل استقرار
OTHER STANDARD IDENTIFIER
Standard Number
77539
Standard Number
106016
LANGUAGE OF THE ITEM
.Language of Text, Soundtrack etc
آخر۲۷
.Language of Text, Soundtrack etc
English
TITLE AND STATEMENT OF RESPONSIBILITY
General Material Designation
)50-40(
First Statement of Responsibility
Brodie, Ivor.
Title Proper
The physics of microfabrication
.PUBLICATION, DISTRIBUTION, ETC
Place of Publication, Distribution, etc.
New York
Name of Publisher, Distributor, etc.
Plenum Press
Date of Publication, Distribution, etc.
1982
PHYSICAL DESCRIPTION
Specific Material Designation and Extent of Item
xix, 503 p. : ill. ; 24 cm
GENERAL NOTES
Text of Note
Includes bibliographical references and index
TOPICAL NAME USED AS SUBJECT
Entry Element
، Microelectronics
Entry Element
، Thin-film circuits
LIBRARY OF CONGRESS CLASSIFICATION
Class number
TK
7874
.
B73
1982
PERSONAL NAME - PRIMARY RESPONSIBILITY
Relator Code
AU
Entry Element
Ivor Brodie and Julius J. Muray
AU .J suiluJ ,yaruM
TI
LOCATION AND CALL NUMBER
Shelving Form of Title, Author, Author/Title
05
Shelving Form of Title, Author, Author/Title
04
