عنوان
پدید آورنده
موضوع
رده
TS 695 .D88 1988
TS
695
.
D88
1988
کتابخانه
محل استقرار
LANGUAGE OF THE ITEM
.Language of Text, Soundtrack etc
لاتين
TITLE AND STATEMENT OF RESPONSIBILITY
First Statement of Responsibility
Pierre Duval
Subsequent Statement of Responsibility
author
Title Proper
High vacuum production in the microelectronics industry
.PUBLICATION, DISTRIBUTION, ETC
Place of Publication, Distribution, etc.
Amesterdam, New York
Name of Publisher, Distributor, etc.
Elsevier
Date of Publication, Distribution, etc.
1988
PHYSICAL DESCRIPTION
Specific Material Designation and Extent of Item
xiii , 222P.: ill.; 24 cm
SERIES
Series Title
Plasma technology ; 2
NOTES PERTAINING TO BINDING AND AVAILABILITY
Text of Note
مرجع به حساب نمي آيد
INTERNAL BIBLIOGRAPHIES/INDEXES NOTE
Text of Note
P: 163 - 167
OTHER VARIANT TITLES
Variant Title
Alcatel vacuum technology (Firm)
TOPICAL NAME USED AS SUBJECT
Entry Element
Vapor-Plating
Entry Element
Microelectronics
Entry Element
Vacuum technology
LIBRARY OF CONGRESS CLASSIFICATION
Class number
TS
695
.
D88
1988
PERSONAL NAME - PRIMARY RESPONSIBILITY
Entry Element
مولف
Relator Code
Duval , Pierre
