عنوان
پدید آورنده
موضوع
رده
{1648},e6b96630f1a967178d06cf8960ed5289
{
1648
},
e6b96630f1a967178d06cf8960ed5289
کتابخانه
محل استقرار
INTERNATIONAL STANDARD BOOK NUMBER
(Number (ISBN
352730746x
English Book
TITLE AND STATEMENT OF RESPONSIBILITY
Title Proper
Enabling technology for MEMS and nanodevices
First Statement of Responsibility
edited by H. Baltes ... [et al.]&
.PUBLICATION, DISTRIBUTION, ETC
Place of Publication, Distribution, etc.
Weinheim [Germany]&
Name of Publisher, Distributor, etc.
Wiley-VCH
Date of Publication, Distribution, etc.
2004
PHYSICAL DESCRIPTION
Specific Material Designation and Extent of Item
xii, 427 p. : ill
SERIES
Series Title
Advanced micro & nanosystems ; v. 1
SUMMARY OR ABSTRACT
Text of Note
Includes bibliographical references and index
TOPICAL NAME USED AS SUBJECT
Entry Element
Microelectromechanical systems
Entry Element
Microelectronics
Entry Element
Nanotechnology
