عنوان
پدید آورنده
موضوع
رده
کتابخانه
محل استقرار
INTERNATIONAL STANDARD BOOK NUMBER
(Number (ISBN
0815514220
English Book
TITLE AND STATEMENT OF RESPONSIBILITY
Title Proper
Handbook of physical vapor deposition (PVD) processing
Other Title Information
film formation, adhesion, surface preparation and contamination control
First Statement of Responsibility
by Donald M. Mattox
.PUBLICATION, DISTRIBUTION, ETC
Place of Publication, Distribution, etc.
Westwood, N.J.
Name of Publisher, Distributor, etc.
Noyes Publications,
Date of Publication, Distribution, etc.
1998
PHYSICAL DESCRIPTION
Specific Material Designation and Extent of Item
xxvii, 945 p. ill.
SUMMARY OR ABSTRACT
Text of Note
Includes bibliographical references and index.
TOPICAL NAME USED AS SUBJECT
Entry Element
Physical vapor deposition- Handbooks, manuals, etc
PERSONAL NAME - PRIMARY RESPONSIBILITY
Entry Element
Mattox, D. M.
