عنوان
پدید آورنده
موضوع
رده
TJ،940،.D89،1988
TJ
،
940
،.
D89
،
1988
کتابخانه
محل استقرار
INTERNATIONAL STANDARD BOOK NUMBER
(Number (ISBN
ISBN 044442878X
English Book
TITLE AND STATEMENT OF RESPONSIBILITY
Title Proper
High vacuum production in the microelectronics industry
First Statement of Responsibility
Pierre Duval
.PUBLICATION, DISTRIBUTION, ETC
Place of Publication, Distribution, etc.
Amsterdam
Name of Publisher, Distributor, etc.
Elsevier
Date of Publication, Distribution, etc.
1988
PHYSICAL DESCRIPTION
Specific Material Designation and Extent of Item
xiii, 222 p. : ill. ; 25 cm.
INTERNAL BIBLIOGRAPHIES/INDEXES NOTE
Text of Note
Includes index
Text of Note
Bibliography: p. 163-167
TOPICAL NAME USED AS SUBJECT
Entry Element
Vapor-plating
Entry Element
Microelectronics
Entry Element
Vacuum technology
LIBRARY OF CONGRESS CLASSIFICATION
Class number
TJ
Book number
940
Classification Record Number
.
D89
1988
PERSONAL NAME - PRIMARY RESPONSIBILITY
Entry Element
Duval, Pierre
PERSONAL NAME - SECONDARY RESPONSIBILITY
Entry Element
Alcatel Vacuum Technology (Firm
