عنوان
پدید آورنده
موضوع
رده
TK،7871.15،.F5,D46
TK
،
7871
.
15
،.
F5
,
D46
کتابخانه
محل استقرار
English Book
TITLE AND STATEMENT OF RESPONSIBILITY
Title Proper
Deposition and growth: limits for microelectronics
First Statement of Responsibility
editor: G.W. Rubloff
.PUBLICATION, DISTRIBUTION, ETC
Place of Publication, Distribution, etc.
New York
Name of Publisher, Distributor, etc.
American Institute of Physics
Date of Publication, Distribution, etc.
1986-
PHYSICAL DESCRIPTION
Specific Material Designation and Extent of Item
v. : ill. ; 25 cm.
TOPICAL NAME USED AS SUBJECT
Entry Element
Vacuum
Entry Element
Vacuum technology
LIBRARY OF CONGRESS CLASSIFICATION
Class number
TK
Book number
7871
.
15
Classification Record Number
.
F5
,
D46
PERSONAL NAME - SECONDARY RESPONSIBILITY
Entry Element
American Vacuum Society
Entry Element
American Institute of Physics
