Advanced materials and technologies for micro/nano-devices, sensors and actuator
[Book]
/ edited by Evgeni Gusev, Eric Garfunkel and Arthur Dideikin
Dordrecht
: Springer,
, c2010.
1 online resource (x, 314 p.)
: , ill. (some col.)
(NATO science for peace and security. Series B, Physics and biophysics,1871-465X.)
"Published in cooperation with NATO Public Diplomacy Division."
"Proceedings of the NATO Advanced Research Workshop on Advanced Materials and Technologies for Micro/Nano-Devices, Sensors and Actuators, St. Petersburg, Russia, 29 June - 2 July 2009"--T.p. verso.
Print
Includes bibliographical references and indexes.
NATO science for peace and security series.Series B,Physics and biophysics
Microelectromechanical systems, Design and construction, Congresses
Nanotechnology, Congresses
Electronic books
621
.
3
.
81
TK7875
.
A37
,
2009eb
NATO Advanced Research Workshop on Advanced Materials and Technologies for Micro/Nano-Devices, Sensors and Acuators(2009 :Saint Petersburg, Russia)