Layered structures and interface kinetics their technology and applications
Tokyo
KTK Scientific ; : Dordrecht ]Netherlands[ ; Boston : Distributed in the U.S.A. and Canada by Kluwer
c1985
viii, 369 p. : ill. ; 24 cm
Papers presented in US-Japan Seminar on Solid Phase Epitaxy and Inferface Kinetics held in Oise, Japan, June 20-24, 1983 ... co-sponsored by the National Science Foundation and Japan Society for the Promotion of Science--Pref
Includes bibliographies and index.
edited by S. Furukawa
1
، Solid state electronics -- Congresses
، Integrated circuits -- Design and construction -- Congresses
، Layer structure )Solids(
، Epitaxy -- Congresses
، Silicon-on-insulator technology
TK
7871
.
85
.
L35
1985
TI
AU Furukawa, Seijiro, 1934-
AU U.S.-Japan Seminar on Solid Phase Epitaxy and Interface Kinetics )1983 : Oise-machi, Japan(