عنوان

Substrate surface preparation handbook /

1523117591

1608072134

1608072142

9781523117598

9781608072132

9781608072149

Substrate surface preparation handbook /

[Book]

Max Robertson.

Boston :

Artech House,

2012.

1 online resource (195 pages) :

illustrations.

Artech House applied photonics series

Includes bibliographical references and index.

Introduction -- Preparation : before the start -- Lapping -- Polishing -- Specific processes and materials -- Specialized techniques -- Surface finish -- Optics -- Semiconductor device Deconstruction -- Metallurgical Polishing and Microscopy -- Laboratory Setup -- Using Interferometry.

0

"Substrate Surface Preparation Handbook serves as a practical, one-stop reference, covering the technologies developed to produce flat surfaces with nanometer accuracy for the subsequent building of semiconductor devices and integrated circuits. This hands-on resource offers you detailed guidance in the entire substrate surface preparation process, from lapping and polishing ... to specialized techniques and surface finishing. Supported with over 125 illustrations, this unique book provides you with a complete understanding of important maintenance methods and the full range of equipment available in the field. You gain the know-how and confidence you need to produce desired results when processing a sample of new material, rather than wasting time and money on a trial and error approach. Moreover, this authoritative book presents in-depth discussions on key applications, such as optics production and semiconductor de-lamination and deconstruction."--

Substrate surface preparation handbook.

Glass grinding and polishing.

Optical materials-- Surfaces.

Glass grinding and polishing.

Optical materials-- Surfaces.

Robertson, Max.

20200823045526.0

pn

[Book]

Y