عنوان
پدید آورنده
موضوع
رده
TK7875 .M33 2012
TK7875
.
M33
2012
کتابخانه
محل استقرار
(v. 1)
(v.3)
(v.2)
(v. 1)
(v.3)
(v.2)
1420055119
142005516x
1420055194
9781420055115
9781420055160
9781420055191
dltt
Fundamentals of microfabrication and nanotechnology.dollar5Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology /
[Book]
Marc J. Madou
3rd ed
Boca Raton, FL :
CRC Press,
c2012
3 v. :
ill. (some col.) ;
29 cm
Includes bibliographical references and index
V. 1. Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology -- v. 2. Manufacturing techniques for microfabrication and nanotechnology -- v. 3. From MEMS to Bio-MEMS and Bio-Nems, Manufacturaing techniques and applications
0
"In Solid State Physics, Fluidics and Analytical Techniques in Micro- and Nanotechnology we lay the foundations for a qualitative and quantitative theoretical understanding of micro-and nano-electromechanical systems, i.e., MEMS and NEMS. In integrated circuits (ICs), MEMS and NEMS, silicon (Si) is still the substrate and construction material of choice"--
"Providing a clear theoretical understanding of MEMS and NEMS, Solid-State Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology covers all aspects of solid state physics behind nanotechnology and science. After exploring the rise of Si, MEMS, and NEMS in a historical context, the text discusses crystallography, quantum mechanics, the band theory of solids, and the silicon single crystal. It concludes with coverage of photonics, the quantum hall effect, and superconductivity. The text offers end-of-chapter problems, worked examples throughout, extensive references, and PowerPoint slides for download, along with a solutions manual for qualifying instructors"--
Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology
Microelectromechanical systems
Microfluidics
Nanoelectromechanical systems
Solid state physics
TK7875
.
M33
2012
Madou, Marc J
20120607234913.0
مطالعه متن کتاب [Book]
Y
