Fundamental principles of engineering nanometrology /
[Book]
Richard Leach
Second edition
Second edition
Second edition
Second edition
1 online resource (384 pages).
Micro & nano technologies series
Description based upon print version of record
Includes bibliographical references and index
Working at the nano-scale demands an understanding of the high-precision measurement techniques that make nanotechnology and advanced manufacturing possible. This new edition of Fundamental Principles of Engineering Nanometrology provides a road map and toolkit for metrologists engaging with the rigor of measurement and data analysis at the nano-scale, from the fundamentals of precision measurement, to different measurement and characterization techniques. This book is an essential guide for the emerging nanomanufacturing and nanofabrication sectors, where measurement and standardiza
Safari Books Online
CL0500000450
Fundamental Principles of Engineering Nanometrology.