Materials science and process technology series. Electronic materials and process technology.
Revised edition of: Deposition technologies for films and coatings, c1982.
Includes bibliographical references and index.
A decade after the first edition of this volume was published, this second edition is being brought out to update the many improvements in deposition technologies, its mechanisms, and applications. The entire volume has been extensively revised and contains at least 50% more material. Five chapters have been added.
Master and use copy. Digital master created according to Benchmark for Faithful Digital Reproductions of Monographs and Serials, Version 1. Digital Library Federation, December 2002.
Handbook of deposition technologies for films and coatings.