Electron Optics of a Scanning Electron Microscope -- Electron Scattering and Diffusion -- Emission of Backscattered and Secondary Electrons -- Electron Detectors and Spectrometers -- Image Contrast and Signal Processing -- Electron-Beam-Induced Current and Cathodoluminescence -- Special Techniques in SEM -- Crystal Structure Analysis by Diffraction -- Elemental Analysis and Imaging with X-Rays.
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Scanning Electron Microscopy provides a description of the physics of electron-probe formation and of electron-specimen interations. The different imaging and analytical modes using secondary and backscattered electrons, electron-beam-induced currents, X-ray and Auger electrons, electron channelling effects, and cathodoluminescence are discussed to evaluate specific contrasts and to obtain quantitative information.