Encyclopaedia of Manufacturing Techniques for Microfabrication and Nanotechnology
/Guomin Jiang...[etal]
London
: Auris Reference
, .2015
4Vol
Vol.1. Fundamentals Techniques in Microfabrication and Nanotechnology. Vol.3.Emerging Technologies in Micro- Nanotechnology Products .- Vol4. Micro and Nanotechnology for Space Systems