Leach, R. K.
Fundamental principles of engineering nanometrology
Oxford : Elsevier Science
William Andrew ; Amsterdam
c2010
xxvi, 321 p. : ill
Micro and nano technologies
Includes bibliographical references and index
by Richard K. Leach
، Nanotechnology
، Microtechnology
، Metrology
620
.
50287
T
174
.
7
.
L43
2010
AU
TI
SE
