24683
Microfabrication and nanomanufacturing
Boca Raton, FL.
Taylor & Francis
2006
401p
Includes bibliographical references and index
]edited by[ Mark J. Jackson
، Microelectronics
Design and construction ، Integrated circuits
Design and construction ، Microelectromechanical systems
TK
7836
.
M523
2006
TI
AU Jackson, Mark J.
CL
