13020
Boyd, Ian W
8591-
Lasers processing of thin films and microstructures; oxidation, deposition, and Etching of insulators
Berlin; New York
Springer-Verlag
C1987
viii, 302p.: 77 ill
Springer series in materials science; 3
Includes index
Ian W. Boyd
Industrial applications ، Lasers
TA
1677
.
B69
1987
AU
TI
SE
CL
