vol.6 edited by Norman G. Einspruch, Graydon B. Larrabee; v.11. edited by Norman G. Einspruch, William R. Wisseman; v.12 edited by Norman G. Einspruch, Howard Huff; v.14 edited by Norman G. Einspruch
Includes bibliographies and index
edited by Norman G. Einspruch
Contents: v.1-5. )Without special titles(.- v.6. Materials and processs characterization.- v.7. )Without special title(.- v.8. Plasma processing for VLSI.- v.9. )Without special title.(- v.01. Surface and interface effects in VLSI. -v.11. GaAs microelectronics.- v.21. Silicon materials.- v.31. Metal-semiconductor contacts and devices.- v.41. VLSI design
Very large scale integration ، Integrated circuits